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Author/Affiliation: Malika ToubalFabrication and Optimization of High Frequency ZnO Transducers for Both Longitudinal and Shear Emission: Application of Viscosity Measurement using Ultrasound
by Hatem Dahmani, Ibrahim Zaaroura, Abbas Salhab, Pierre Campistron, Julien Carlier, Malika Toubal, Souad Harmand, Vincent Thomy, Marc Neyens and Bertrand Nongaillard
Advances in Science, Technology and Engineering Systems Journal,
Volume 5,
Issue 6,
Page # 1428–1435,
2020;
DOI: 10.25046/aj0506173
Abstract:
This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is effectuated. Second, to promote shear waves, new deposition conditions were applied,…
Read More(This article belongs to the SP9 (Special Issue on Multidisciplinary Innovation in Engineering Science & Technology 2020) & Section Acoustics (ACO))
