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Author/Affiliation: Marcos Crescencio González DomínguezOpen AccessArticle
7 Pages, 1,904 KB 
Synthesis and Characterization of CN Thin Films Produced by DC-Pulsed Sputtering in an \(CH_3CH_2OH-N_2\) Atmosphere
Abstract:
This paper reports on the successful deposition of amorphous carbon nitride thin films (a-CNx). Samples were deposited using a DC-pulsed sputtering technique in CH3CH2OH-N2 atmosphere at constant pressure (1 Torr). Raman spectra were collected to investigate the bonding structure of the deposed thin films, while scanning electron microscopy (SEM) and atomic force microscopy (AFM) were…
Read More(This article belongs to Section Characterization & Testing in Materials Science (MCT))