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Author/Affiliation: Vincent ThomyOpen AccessArticle
8 Pages, 1,124 KB 
Fabrication and Optimization of High Frequency ZnO Transducers for Both Longitudinal and Shear Emission: Application of Viscosity Measurement using Ultrasound
Abstract:
This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is effectuated. Second, to promote shear waves, new deposition conditions were applied,…
Read More(This article belongs to the SP9 (Special Issue on Multidisciplinary Innovation in Engineering Science & Technology 2020) & Section Acoustics (ACO))