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Instead of approaches of solid mechanics or a formal description of experimental data an interdisciplinary approach is proposed to consider failure and deformation as thermodynamic processes. Mathematical modeling of the processes is carried out using rheological models of the material. One fracture criterion is used, that formally corresponds to the achievement of a threshold concentration…

Microelectromechanical Systems (MEMS) are devices made up of several electrical and mechanical components. They consist of mechanical functions (sensing, thermal, inertial) and electrical functions (switching, decision making) on a single chip made by microfabrication methods. These chips exhibit combined properties of the two functions. The size of system has characteristic dimensions less than 1mm but…