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Keyword: Resonating Micro-mirrorsOpen AccessArticle
10 Pages, 4,035 KB 
Design and Electronic Interfacing of FR4 and Polyimide PCB-based Electromagnetic Resonating Micro-mirrors
Abstract:
This paper presents the design and fabrication of an electromagnetically actuated PCB-based resonating scanning micro-mirror for LiDAR applications, with optimization targeted towards low-cost fabrication and a high scanning angle. Traditional silicon MEMS-based micro-mirrors, while offering high precision and compatibility with CMOS processing, are limited by fragility at low scanning frequencies and costly fabrication processes. To…
Read More(This article belongs to Section Optics (OPT))